Relation of Contact Resistance Reduction and Process Parameters of Bonded Copper Interconnects in Three-dimensional Integration Technology
نویسندگان
چکیده
Contact resistances of bonded copper interconnects in threedimensional integration technology under different bonding conditions are investigated by using a novel test structure. A reduction in specific contact resistance is obtained by longer anneal time. The specific contact resistance of bonded interconnects with longer anneal time does not change with the interconnect sizes. Underlying physical mechanism is discussed. The relationship between specific contact resistance and bonded wafer location is discussed as well. The specific contact resistance shows a lower value at the center of the wafer. Stability and reversibility tests show that the specific contact resistance does not change when the stress current is increased gradually or decreased after that. The excellent stability and reversibility of specific contact resistances shows that the microstructure of bonded Cu interconnects has reached a stable state.
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